Particle Beam Transport Apparatus And Method Of Transporting A Particle Beam With Small Beam Spot Size

ABSTRACT

An apparatus for transporting a charged particle beam is provided. The apparatus may include: means for scanning the charged particle beam on a target, a dipole magnet arranged upstream of the means for scanning, at least three quadrupole lenses arranged between the dipole magnet and the means for scanning, and means for adjusting the field strength of at least three quadrupole lenses in function of the scanning angle of the charged particle beam. The apparatus can be made at least single achromatic.

FIELD OF THE INVENTION

The present invention is related to an apparatus for transporting acharged particle beam (a beam transport line) and to a method oftransporting a charged particle beam. Particularly, the presentinvention is related to an apparatus comprising dipole magnets forbending the beam path and a scanner for scanning the charged particlebeam over a target. The apparatuses and methods of the invention can beused for non-destructive screening and sterilisation.

STATE OF THE ART

It is known in the art to transport a charged particle beam, such as anelectron or proton beam, by an apparatus, generally referred to as abeam transport line, from a source in which the beam is generated (e.g.a Rhodotron™, synchrotron, cyclotron, linear accelerator (LINAC) orsimilar) to a target on which the beam is made to strike. Beam transportlines typically comprise bending magnets for deflecting the path of thebeam and quadrupole lenses for adjusting the beam profile or size.Quadrupole lenses can be magnetic or electric devices. A scanner forscanning the particle beam over the target area may be provided.

The scanner imparts an angular deflection to the charged particle beam.This angular deflection can be time-dependent. The dispersion function(curve) of the beam transport line differs in function of the scanningangle. This can result in a beam spot which becomes too large on somelocations of the target area.

The charged particle beams produced by beam generators are typically notmono-energetic. A certain energetic distribution of the beam should betaken into account. When a charged particle beam is scanned over largeangles (e.g. ±45°), the deflection of particles within the beam havingslightly different energies is not identical. Moreover, most beamtransport lines comprise bending (dipole) magnets and the angulardeflection imparted by these magnets to the beam particles can bedifferent depending on the particle energies. These phenomena result inan increased beam spot size at target location.

U.S. Pat. No. 6,903,350 discloses an ion beam scanning system in which afocus adjustment apparatus is provided to dynamically adjust a focalproperty of an ion beam. Patent application EP 1584353 discloses a beamtransport system for the application of a proton beam to a target volumecomprising two sweeper magnets and a dynamic quadrupole corrector.

However, in the above systems, beam focal properties at the target maystill be unsatisfactory when scanning over large angles. Furthermore,only one focal property is adjusted.

AIMS OF THE INVENTION

The present invention aims to provide an apparatus for transporting acharged particle beam resulting in at least the same or improved beamprofile characteristics (smaller beam spot size) at the output of theapparatus compared to prior art apparatuses.

It is an aim of the invention to provide an apparatus for transporting acharged particle beam having more compact dimensions (especiallyconcerning the length of the beam line) but resulting in similar beamprofile characteristics compared to prior art apparatuses.

It is an aim of the invention to increase the angle over which a chargedparticle beam is scanned without deteriorating the beam profilecharacteristics.

The present invention equally aims to provide a method of transportingand scanning a charged particle beam over a target area which results inbetter beam profile characteristics (e.g. the beam spot size) comparedto prior art methods.

It is an aim of the invention to counter the influence of beam energyspread on the beam spot size at a target location.

SUMMARY OF THE INVENTION

Aims of the invention are achieved by providing, as set out in theappended claims, an apparatus for transporting a charged particle beam,a method of transporting a charged particle beam and uses of saidapparatus.

According to a first aspect of the invention, there is provided anapparatus for transporting a charged particle beam to a target (e.g.from a beam generator or another source). The apparatus comprises: meansfor scanning the charged particle beam on the target, a dipole magnetpreferably arranged upstream of the means for scanning, at least threequadrupole lenses, preferably arranged between the dipole magnet and themeans for scanning and means for adjusting the field strength of said atleast three quadrupole lenses in function of the scanning angle of thecharged particle beam.

The quadrupole lens can be a magnetic device. In that case, the fieldstrength refers to the strength of a magnetic field. The quadrupole lenscan be an electrical device. In that case, the field strength refers tothe strength of an electrical field. The quadrupole lens can also be anelectro-magnetic device. In that case, the field strength refers to thestrength of an electro-magnetic field.

The field strength can be dynamically adjusted (i.e. in a time-dependentway). Preferably, the means for adjusting the field strength arearranged for obtaining a beam spot size not larger than a predeterminedsize at multiple locations on a line or a surface. Said line or surfaceis preferably located on the target. More preferably, the means foradjusting the field strength are arranged for obtaining a beam spot sizeof at most 20 mm and preferably at most 10 mm at said one or morelocations.

Preferably, the means for adjusting the field strength are arranged forobtaining at least a single achromatism of the apparatus at apredetermined location. Said predetermined location can be on a line ora surface. Said line or surface is preferably located on the target.

Preferably, the apparatus comprises three quadrupole lenses between thedipole magnet and the means for scanning. Preferably, said means foradjusting the field strength are arranged for adjusting the fieldstrength of said three quadrupole lenses.

Preferably the means for adjusting the field strength comprise a lookuptable configured for storing predetermined information related to thefield strength of the quadrupole lenses for predetermined scanningangles.

Preferably, the apparatus comprises an additional quadrupole lensarranged downstream of the means for scanning the beam. Said additionalquadrupole lens is arranged for adjusting the direction of the chargedparticle beam such that the beam has a same direction irrespective ofthe scanning angle or for adjusting it to any other (predetermined)angular distribution.

Preferably, the means for scanning and/or at least one quadrupole lenscomprise a magnet, said magnet comprising a yoke made of a magneticmaterial which is electrically insulating. The material is preferablyferrite.

Preferably, the means for scanning and/or one or more of said quadrupolelenses comprise a magnet, said magnet comprising a laminated yoke.

Preferably, the apparatus comprises a vacuum chamber, which is at leastpartially made of an electrically insulating material. The means forscanning and/or one or more of the quadrupole lenses are preferablyprovided at the outside of the vacuum chamber.

Preferably, the means for scanning and/or one or more of the quadrupolelenses are provided at the inside of a vacuum chamber.

Preferably, the means for scanning are arranged for scanning the chargedparticle beam over an angle of 90° (e.g. from −45° to +45°), morepreferably over an angle of 100°.

According to a second aspect of the invention, there is provided amethod of transporting a charged particle beam to a target. The methodcomprises a first step of: transporting the charged particle beam from abeam generator to a means for scanning the beam. At a location upstreamof said means for scanning, the charged particle beam is bent over anonzero angle. In a next step, the strength of the magnetic and/orelectrical field at three or more locations between said upstreamlocation and the means for scanning is adjusted (dynamically) infunction of the scanning angle of the beam. In a following step, thebeam is scanned over the target.

Preferably, the method comprises after the scanning step, the step ofadjusting the direction of the beam such that the beam has a samedirection irrespective of the scanning angle. The direction of the beamcan be adjusted to any other (predetermined) angular distribution aswell.

According to a third aspect of the invention, there is provided a use ofapparatuses according to the invention for non-intrusive detection ofmaterials, products and/or devices. Preferably, the use is directed tothe screening of cargos.

According to another aspect of the invention, there is provided a use ofapparatuses according to the invention for sterilisation.

According to still another aspect of the invention, there is provided ause of apparatuses according to the invention for the modification ofmaterial properties.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 represents the paths followed by two charged particles havingslightly different energies.

FIG. 2 represents an apparatus according to the invention fortransporting a charged particle beam from a beam generator to a targetand for scanning the beam over the target.

DETAILED DESCRIPTION OF THE INVENTION

Embodiments of the present invention will now be described in detailwith reference to the attached figures, the invention is not limitedthereto but only by the claims. The drawings described are onlyschematic and are non-limiting. In the drawings, the size of some of theelements may be exaggerated and not drawn on scale for illustrativepurposes. The dimensions and the relative dimensions do not necessarilycorrespond to actual reductions to practice of the invention. Thoseskilled in the art can recognize numerous variations and modificationsof this invention that are encompassed by its scope. Accordingly, thedescription of preferred embodiments should not be deemed to limit thescope of the present invention.

Furthermore, the terms first, second and the like in the description andin the claims are used for distinguishing between similar elements andnot necessarily for describing a sequential or chronological order. Itis to be understood that the terms so used are interchangeable underappropriate circumstances and that embodiments of the inventiondescribed herein are capable of operation in other sequences thandescribed or illustrated herein.

Moreover, the terms top, bottom, left, right, over, under and the likein the description and the claims are used for descriptive purposes andnot necessarily for describing relative positions. The terms so used areinterchangeable under appropriate circumstances and embodiments of theinvention described herein can operate in other orientations thandescribed or illustrated herein. For example, “left” and “right” of anelement indicates being located at opposite sides of this element.

It is to be noticed that the term “comprising” should not be interpretedas being restricted to the means listed thereafter; it does not excludeother elements or steps. Thus, the scope of the expression “a devicecomprising means A and B” should not be limited to devices consistingonly of components A and B. It means that with respect to the presentinvention, A and B are relevant components of the device.

Where numerical values are given with regard to limitations of aquantity, or the outcome of a measurement, for the assessment of thosevalues, account shall be taken of variations due to impurities, methodsused to determine measurements, human error, statistical variance, etc.

Where a range of numerical values is defined as extending between alower limit and an upper limit, the range is to be construed asincluding said lower limit and said upper limit, unless otherwise noted.

The present invention tackles problems related to beam energy spread andtransport line dispersion and is able to maintain the beam spot size ata predetermined location (mostly, on the target or on the collimator)within a predetermined limit. Adopted solutions work towards making theapparatus for transporting the beam achromatic. The term achromatism foroptics of charged particles is described by H. Wolnik in his book“Optics of charged particles” , Academic Press Inc. 1987.

The concept of achromatism will be explained referring to FIG. 1. Assumea mono-energetic charged particle beam, wherein the particles all haveenergy E. The particles are made to move from a same point S to a pointF along a curved path P. All particles in the mono-energetic beam willfollow the same curved path P if they all started from the same point S.However, when the beam has a distributed energy, this is generally notthe case. Consider two charged particles of the beam having respectiveenergies E and E+ΔE. The particle with energy E which moves from Sfollowing the same curved path P will pass through F. A charged particlewith energy E+ΔE that starts in S in the same initial direction will ingeneral not follow the path P of the particle having energy E and hencenot go through point F, but through a point F+ΔF in the vicinity of F.As a result, the beam spot between S and F has increased in size.

An achromatic beam transport line is made such that the two chargedparticles with respective energies E and E+ΔE which start from a samepoint S, also end in a same predetermined point F. The two particlesgenerally do not follow the same path and the two paths through F have adifferent direction. Such a beam transport line is said to be singleachromatic. When the two charged particles additionally pass through Fwith a same direction of motion, the beam transport line is said to bedouble achromatic. Whenever the term “achromatic” is used in thefollowing, it refers to at least single achromatism.

When the path of the charged particle beam in the beam transport line isfixed and time-independent, it suffices to provide static magneticand/or electrical fields to make the beam transport line (single)achromatic. However, when a scanner is provided at an end of the beamtransport line, the beam path is time-dependent, and the field strengthin the beam transport line has to be adapted dynamically in order tomaintain the beam transport line achromatic for all scanning angles.

Achromatism hence relates to dispersion in the beam transport line,which is determined by a dispersion function. For a beam having a givenenergy spread, the dispersion (function) of a beam transport line willgenerally cause an increase in beam spot size, the increase being largerfor dispersion functions having larger values. As the size of the beamspot at the target typically must fall within specification, a beamtransport line with low dispersion (small valued function) enables tochoose a beam generator with relaxed specifications with reference tobeam energy spread.

The dispersion function contributes to the beam spot size in an amountproportional to the beam energy spread. The value of the function at agiven location relates to the absolute contribution to the beam spotsize per unit beam energy spread, which can be expressed in mm/%.Preferably, the dispersion function at a predetermined location fallswithin a predetermined range, more preferably at a location downstreamof the scanner. The dispersion function hence can be regarded as a focalproperty of a beam transport line. Dispersion is however only one focalproperty. Other focal properties can refer to the beam spot sizedirectly. The beam spot size can be characterised by the dimensions ofthe beam spot along two perpendicular directions, usually referred to ashorizontal X and vertical (axial, transversal) Y. Preferably the beamspot size in X and Y direction falls within a predetermined range at apredetermined location, preferably downstream of the scanner. Thepredetermined location for assessing beam dispersion and beam spot sizein X and Y is preferably the same.

It has been observed that when scanning over large angles, such asbetween about +45° and about −45°, the dynamical adjusting of only onefocal property is not sufficient for obtaining a high quality beamneeded for particular applications. Therefore, it is preferred that thethree focal properties as identified above be adjusted dynamically, infunction of the scanning angle in order to obtain a beam quality whichis almost invariant over the range of scanned angles.

When referring to a range of scanning angles, these can be understood asa number of discrete angles that are scanned by the scanner. Hence, arange of scanning angles need not be a continuous range.

Referring to FIG. 2, the invention provides for an apparatus 10 fortransporting a charged particle beam, e.g. from a beam generator 2 to atarget 3. The apparatus 10 comprises means 12 for scanning the chargedparticle beam on the target 3. Means 12 can comprise one or morescanning magnets. The beam path 11 through beam transport apparatus 10is bent at at least one (additional) location 14. Therefore, apparatus10 further comprises means 15 for deflecting the path 11 of the chargedparticle beam at location 14. Means 15 can be a bending magnet, alsoreferred to as a dipole magnet. The dipole magnet 15 and location 14 arearranged upstream of the scanning means 12.

The apparatus 10 of the invention further comprises at least threequadrupole lenses 17 which are arranged in between the dipole magnet 15and the scanning means 12. Each quadrupole lens 17 can be a quadrupolemagnet, or a quadrupole electrical device. The apparatus 10 furtherprovides means for adjusting the field strength of the quadrupole lenses17. The field strength is dynamically adjusted in function of thescanning angle. The scanning angle varies with time (is time-dependent).The field hence can be a magnetic or an electrical field or acombination of both.

The (magnetic or electrical) field strength of each of the quadrupolelenses 17 is adjusted in order to adjust the time-dependent path of thebeam particles in function of their energies.

The field strength of each of the quadrupole lenses is preferably soadjusted as to influence one or more focal properties of the beam, suchas one or more of: the beam spot size in X, the beam spot size in Y andthe dispersion function.

By applying the means for adjusting the field strength to at least threequadrupole lenses 17, the variance of focal properties between differentscanning angles can be significantly reduced, e.g. at a locationdownstream of the scanner such as the target.

The field strength of each quadrupole lens 17 is preferably adjusted soas to make the beam transport apparatus 10 at least single achromatic.The achromatism is obtained at a predetermined location, preferably onthe target or a location downstream of the scanning means 12. On thetarget or that downstream location, the spot on which the beam strikesor passes through is not fixed, but depends on the scanning angle.Hence, the beam transport apparatus 10 is preferably made achromatic forall scanning angles at said predetermined location (achromatic for allscanned locations). The predetermined location can be on a line in caseof 1D scanning. It can be on a surface as well in case of 2D scanning.

On said line, or on said surface, discrete points that will be scannedcan be selected. The beam profile characteristics then can be assessedfor those selected discrete points in order to check whetherspecifications are met.

At each target location, the beam spot can be made to oscillate in orderto spread the heat production on the target. In case of 1D scanning,this means that a small oscillation in the other (perpendicular)direction can be imparted to the beam. This oscillation typically hasnegligible influence on the beam energy distribution at target location.

In practice, the beam transport apparatus 10 is said to be achromaticwhen at the predetermined location, for each scanned angle, chargedparticles with different energies pass through a spot with predeterminedsize, i.e. when the beam spot size falls within a predeterminedtolerance limit. This tolerance limit can be substantially smaller thanfor the case in which the field strength of the quadrupole lens is notadjusted. The full beam spot size at the predetermined location (thetarget location) can be made smaller than or equal to 20 mm. Preferably,the full beam spot size at the predetermined location (the targetlocation) is made smaller than or equal to 10 mm.

The beam spot profile along the X and Y direction at the predeterminedlocation (the target location) is often assumed as having a Gaussiandistribution. The full beam spot size preferably refers to the 4σdiameter of an equivalent Gaussian beam (i.e. the diameter correspondingwith a 2σ radius).

Furthermore, the dispersion function at the predetermined location (e.g.the target location) can be dynamically adjusted such that thecontribution of energy spread to the total beam spot size is minimised.As the beam energy spread is proportional to the beam kinetic momentumspread, the above specification can also be expressed in function of thekinetic momentum spread of the beam. Preferably, the dispersion functionat the predetermined location (e.g. the target location) is dynamicallyadjusted such that the contribution of beam kinetic momentum spread (orequivalently beam energy spread) to the total beam spot size is lessthan or equal to 10 mm per % beam kinetic momentum spread (ΔP/P), morepreferably less than or equal to 5 mm/% ΔP/P.

In a more advantageous embodiment, the beam transport apparatuscomprises more than one dipole magnet. FIG. 2 illustrates a beamtransport apparatus 10 comprising two dipole magnets 15 and 16. Thethree or more quadrupole lenses 17 whose field strength is adjusted arepreferably arranged in between a dipole magnet and the scanning means.The scanning means 12 can be provided upstream or downstream of the mostdownstream dipole magnet 16.

An advantage of an achromatic beam transport apparatus 10 is that thescanning means 12 can be arranged to scan the beam over large scanningangles, such as e.g. from −45° to +45° or even more, without anysignificant increase of beam spot size.

The ability of large scanning angles allows for making the apparatusmore compact (shorter beam line). If in the configuration of FIG. 2, thescan angle would have been limited to smaller values, the scanning meanswould have to be arranged at a larger distance from the target in orderto cover a same target area. This would have led to a larger beamtransport apparatus and potentially to an increased cost of the beamtransport line (including increased cost of the building in which theapparatus is to be installed).

The beam transport apparatus can comprise a large quadrupole lens 13,advantageously provided downstream of the scanning means 12, moreadvantageously at the downstream end of the scan horn. Large quadrupolelens 13 is arranged for deflecting the scanned charged particle beam.The beam can be deflected by the large quadrupole lens 13 such that itis parallel to a predetermined direction (e.g. perpendicular to thetarget 3) for all scanning angles. Other angular distributions impartedby the quadrupole lens 13 to the scanned beam are possible as well.Quadrupole lens 13 is preferably a large quadrupole magnet.

The target 3 can be an x-ray target. The target can be preceded by acollimator, e.g. for collimating the reflected X-rays.

In the embodiment of FIG. 2, the scanning means 12 comprise one scanningmagnet (dipole magnet) for deflecting the charged particle beam in 1D,over a line (deflection in one plane). The scanning can be performed indiscrete spots (points) on said line. In an alternative embodiment, thescanning means are arranged to deflect the beam in 2D, covering asurface. Therefore, the scanning means 12 can comprise two scanningmagnets for deflecting the beam along two orthogonal directions (anXY-scanner).

A further advantage of the provision of at least three quadrupole lenses17 and means for dynamic adjustment of the field strength thereof isthat the dynamics of the field strength of each of the three (or more)quadrupole lenses 17 can be limited, resulting in less stringentspecifications required for the power supply of the quadrupole lenses(and/or the means for adjusting the field strength thereof).

Furthermore, apparatuses according to the invention enable a fastscanning of the beam, while maintaining the high beam quality standardsas indicated above. Preferably, two points on the target defining ascanning angle of 1.8° can be scanned in less than 100 μs, morepreferably less than 80 μs, most preferably less than 60 μs. Apparatusesaccording to the invention advantageously enable the indicated fastdynamics with maintaining the high beam quality specifications asindicated above.

The dynamical field in the quadrupole lenses 17 can give rise tosignificant eddy currents in the core material of the lenses. In anadvantageous embodiment, the one or more quadrupole lenses 17 aremagnets, the yoke of which is arranged to minimize the occurrence ofparasitic fields. Therefore, the yoke is preferably made of a magneticmaterial which is electrically insulating, such as ferrite. In analternative embodiment, the yoke is laminated (of e.g. iron or steel)and can comprise insulating layers (e.g. coatings) in between thelaminae.

Ferrite as yoke material has additionally the advantage of having a muchsmaller hysteresis effect than e.g. iron.

In a preferred embodiment, the scanning means comprise at least onescanning magnet. The scanning magnet comprises a yoke to which the sameconstructional details as for the quadrupole magnets can be applied.Hence, the yoke of the at least one scanning magnet is preferably madeof a magnetic material which is electrically insulating and/or islaminated. The yoke is preferably made of ferrite.

The beam transport apparatus 10 comprises a vacuum chamber through whichthe charged particle beam propagates. The time-varying magnetic fieldcreated by one or more quadrupole magnets 17 and/or the scanning means12 can give rise to eddy currents in the shell of the vacuum chamber,which can heat the vacuum chamber and can influence the beam.Advantageously, the vacuum chamber is constructed so as to minimize theoccurrence of eddy currents in the shell thereof.

According to a preferred embodiment, one or more quadrupole lenses 17and/or the scanning means 12 are provided at the outside of the vacuumchamber. In this case, the (shell of the) vacuum chamber can be made(fully or partially) of an electrically insulating material, e.g. glassor a ceramic material.

According to an alternative embodiment, one or more quadrupole lenses 17and/or the scanning means 12 are provided inside of the vacuum chamber,in which case the vacuum chamber will be less subjected to eddycurrents. In the latter case, the vacuum chamber can be made of amaterial typically used in the art, such as steel or stainless steel.Care has to be taken for making the passages of electrical wires andcooling water to the lenses through the vacuum chamber's shell leaktight.

The beam transport apparatus 10 can comprise additional dipole magnetsand/or quadrupole lenses with a fixed (static) field.

Achromatic beam transport apparatuses 10 can be made more compact thanbeam transport apparatuses of the prior art. Therefore, the former canfind applications in fields where smaller apparatuses are preferred,such as for the sterilisation of products or materials.

Another field of application is the modification of material properties,such as used for cables, heat shrinkage foils and colour modification ofgemstones.

Apparatuses of the invention can find applications in fields whereinlarge areas are to be scanned, such as for example the screening(non-intrusive inspection) of cargos or bulk transport containers.

Apparatuses of the invention can also be suitable for radiotherapy,irradiation of polymers, and other known uses of charged particle beams.

The invention equally provides a method of transporting a chargedparticle beam from a beam generator to a target. The charged particlebeam is deflected in a time-dependent way (is scanned) over the target.Upstream of the scanning location, the (magnetic and/or electrical)field strength at three or more locations through which the chargedparticle beam passes is adjusted in function of the scanning angle ofthe beam.

In a preferred embodiment, the direction of the scanned beam is adjustedto a beam which has the same direction irrespective of the scanningangle (is parallel for all scanning angles). Alternatively, any otherangular distribution in function of the scanning angle can be impartedto the scanned beam.

In a preferred embodiment, the means for adjusting the field strength ofthe quadrupole lenses 17 comprise a lookup table configured for storinginformation related to the field strength for predetermined scanningangles. Such a lookup table can be constructed once, e.g. when theapparatus is installed. Information for storing in the lookup table canbe determined experimentally. A lookup table significantly reduces thecomplexity of the means for adjusting the field strength.

1. An apparatus (10) for transporting a charged particle beam to atarget, the apparatus comprising: a scanning device configured to scanthe charged particle beam on said target, a dipole magnet arrangedupstream of the scanning device, at least three quadrupole lensesarranged between the dipole magnet and the scanning device for scanning,and an adjustment device configured to adjust a field strength of the atleast three quadrupole lenses as a function of a scanning angle of thecharged particle beam.
 2. The apparatus according to claim 1, whereinthe adjustment device is configured for adjusting the field strength ofthree quadrupole lenses.
 3. The apparatus according to claim 1, whereinthe adjustment device is arranged for obtaining at least a singleachromatism of the apparatus at multiple predetermined locations on aline or a surface.
 4. The apparatus according to claim 1, wherein theadjustment device comprises a lookup table configured for storingpredetermined information related to field strengths of the quadrupolelenses for predetermined scanning angles.
 5. The apparatus according toclaim 1, comprising an additional quadrupole lens arranged downstream ofthe scanning device and wherein the additional quadrupole lens isarranged for adjusting the direction of the charged particle beam suchthat the beam has a same direction irrespective of the scanning angle orfor adjusting it to any other angular distribution.
 6. The apparatusaccording to claim 1, wherein the scanning device and the at least threequadrupole lenses comprises a magnet, the magnet comprising a yokecomprising of a magnetic material which is electrically insulating. 7.The apparatus according to claim 1, wherein the scanning device and theat least three quadrupole lenses comprises a magnet, the magnetcomprising a laminated yoke.
 8. The apparatus according to claim 1,comprising a vacuum chamber at least partially made of an electricallyinsulating material, and wherein the scanning device and quadrupolelenses are provided at the outside of the vacuum chamber.
 9. Theapparatus according to claim 1, wherein the scanning device andquadrupole lenses are provided at the inside of a vacuum chamber. 10.The apparatus according to claim 1, wherein the scanning device isarranged for scanning the charged particle beam over an angle of 90°.11. A method of transporting a charged particle beam to a target, themethod comprising: transporting the charged particle beam from a beamgenerator to a scanning device the beam, with the charged particle beambent over a nonzero angle at a location upstream of the scanning device,adjusting a magnetic and/or electrical field strength at three or morelocations between the upstream location and the scanning device as afunction of a scanning angle of the beam, and scanning the beam over thetarget. 12-15. (canceled)
 16. A method for non-intrusive detection ofmaterials, the method comprising: providing a scanning device forreleasing a charged particle beam; providing a dipole magnet arrangedupstream of the scanning device; providing at least three quadrupolelenses arranged between the dipole magnet and the scanning device;providing an adjusting device for adjusting a field strength of the atleast three quadrupole lenses as a function of a scanning angle of thecharged particle beam; and deflecting the charged particle beam over thematerials in a time-dependent manner.
 17. The method of claim 15,wherein the materials are cargo.
 18. The method of claim 15, wherein thestep of deflecting the charged particle beam over the materials iseffective for sterilization.
 19. The method of claim 15, wherein thestep of deflecting the charged particle beam over the materials iseffective for modification of the properties of the material.
 20. Theapparatus according to claim 1, wherein the scanning device comprises amagnet, the magnet comprising a laminated yoke.
 21. The apparatusaccording to claim 1, wherein at least three quadrupole lenses comprisesa magnet, the magnet comprising a laminated yoke.